Fundamentals of micro- and nanotechnology

Elective course in master program in physics

MC2 Chalmers

Bechelor's degree in physics or similar

The core of the course is dedicated to the theory and practice of micro- and nano-fabrication techniques, one of the most important constituents of modern Nanoscale Technology. Modern pattern transfer techniques like e-beam- or x-ray lithography and various thin film deposition methods including thermal-evaporation, sputtering, chemical-vapor deposition, and epitaxy are covered in this course, with their physical- and chemical backgrounds shortly mentioned. Film formation, its structure and methods of characterization are explained, with particular emphasis on correlation between the deposition parameters and resulting material properties. During the lectures students also learn the vacuum systems including system operation and design, and the physical processes in gases. Also, a few practical devices like CMOS-transistors or light-emitting diodes are considered in more details.

• describe and arrange material-science aspects and physical principles of nano-scale technology
• examine and illustrate the link between processing, material structure, resulting properties, and performance of the devices
• select proper materials, deposition, and characterization techniques for a given task
• describe and assess advantages and limitations of different lithography- and thin-film deposition techniques
• overview the development- and describe the most recent trends in nano-scale technology
• present a critical summary of one of the novel and promising nano- fabrication techniques or devices at a student conference
• tell the general rules and safety procedures for working in the clean-room environment and with hazardous chemicals.

This course includes lectures, several demonstrations, and a literature project. A number of quizzes are given to deepen the knowledge obtained during the lectures and to prepare for the quiz-based exam.

Quiz-based written examination usually containing 120-130 quiz questions (70%). 20% will be given for doing homework assignments. The last 10% will be given for making a literature project and participation in the lab demonstrations.

If a student who has been failed twice for the same examination element wishes to change examiner before the next examination session, such a request is to be granted unless there are specific reasons to the contrary (Chapter 6 Section 22 HF).

If a student has received a certificate of disability study support from the University of Gothenburg with a recommendation of adapted examination and/or adapted forms of assessment, an examiner may decide, if this is consistent with the course’s intended learning outcomes and provided that no unreasonable resources would be needed, to grant the student adapted examination and/or adapted forms of assessment.

If a course has been discontinued or undergone major changes, the student must be offered at least two examination sessions in addition to ordinary examination sessions. These sessions are to be spread over a period of at least one year but no more than two years after the course has been discontinued/changed. The same applies to placement and internship (VFU) except that this is restricted to only one further examination session.

If a student has been notified that they fulfil the requirements for being a student at Riksidrottsuniversitetet (RIU student), to combine elite sports activities with studies, the examiner is entitled to decide on adaptation of examinations if this is done in accordance with the Local rules regarding RIU students at the University of Gothenburg.

The results of and possible changes to the course will be shared with students who participated in the evaluation and students who are starting the course.