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Surface nanostructuring by implantation of cluster ions

Journal article
Authors Vladimir Popok
Sergei Prasalovich
Eleanor E B Campbell
Published in Vacuum
Volume 76
Issue 2-3
Pages 265-272
Publication year 2004
Published at Department of Physics (GU)
Pages 265-272
Language en
Links www.sciencedirect.com/science?_ob=A...
Keywords cluster ion implantation, cluster-surface collision, crater, hillock
Subject categories Physical Sciences, Surfaces and interfaces

Abstract

A brief state-of-the-art review in the field of cluster ion implantation is presented. Ionised cluster beams are considered as a controllable and versatile tool for modification and processing of surfaces and near-surface layers on an atomistic scale as an alternative to ion implantation and ion assisted deposition. The main effects occurring under cluster-surface collisions as well as advantages in the application of cluster ion beams are reviewed. The problem of surface erosion under impact of energetic cluster ions is emphasised in the paper. A model explaining crater and hillock formation on target surfaces with relation to the thermal-transfer effect and local target melting at the collision spot is discussed.

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